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Wafer-Scale-Compatible Substrate Undercut for Ultra-Efficient SOI Thermal Phase Shifters

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Abstract

We present a thermally isolated phase shifter through undercutting the silicon waveguide and resistive heaters, yielding a low-power (Pπ = 1.2 mW) and low-crosstalk tunable Mach-Zehnder interferometer.

© 2022 The Author(s)

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Poster Presentation

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