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Conferences > CLEO_SI > 2023 > SF3K > SF3K.3

All-dielectric, visible wavelength focusing metalens with planar surface for mechanical robustness

Joon-Suh Park, Kailyn Vaillancourt, Soon Wei Daniel Lim, Christina M. Spaegele, and Federico Capasso

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Abstract

We present a path to truly ‘flat’, all-oxide metalenses working at visible wavelength comprising high-aspect ratio TiO2 nanopillars infused into fused silica substrate. We show both a proof-of-concept infused metalens using electron-beam lithography, and an example of mass-manufacturing using deep-ultraviolet projection lithography.

© 2023 The Author(s)

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