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Conferences > CLEO_SI > 2023 > SM3P > SM3P.4

An Etchless Integration Platform for Superconducting Nanowire Single Photon Detectors

Filippo Martinelli, Darren M. Z. Koh, Shuyu Dong, Anton N. Vetlugin, Harish N.S. Krishnamoorthy, Christian Kurtsiefer, and Cesare Soci

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Abstract

We introduce a new etchless integration platform for superconducting nanowire single photon detectors based on bound states in the continuum polymer strip waveguides, which enables dense fabrication of high-efficiency detectors in planar photonics circuits.

© 2023 The Author(s)

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