Wafer-Scale Atomic-Layer-Deposition of Er3+- and Yb3+- Doped Gain Materials for Integrated Photonics

Andreas C. Liapis; Vincent Pelgrin; Vincent Pelgrin; Peng Liu; Xiaoqi Cui; José M.A. Rosa; Heli Seppännen; Diao Li; Igor Reduto; Seppo Honkanen; Harri Lipsanen; Zhipei Sun; Zhipei Sun

doi:10.1364/CLEO_SI.2023.STh1O.4

CLEO 2023
Technical Digest Series (Optica Publishing Group, 2023),
paper STh1O.4
•https://doi.org/10.1364/CLEO_SI.2023.STh1O.4

Wafer-Scale Atomic-Layer-Deposition of Er³⁺- and Yb³⁺- Doped Gain Materials for Integrated Photonics

Andreas C. Liapis, Vincent Pelgrin, Peng Liu, Xiaoqi Cui, José M.A. Rosa, Heli Seppännen, Diao Li, Igor Reduto, Seppo Honkanen, Harri Lipsanen, and Zhipei Sun

CLEO: Science and Innovations 2023

San Jose, CA United States
7–12 May 2023
ISBN: 978-1-957171-25-8

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A. C. Liapis, V. Pelgrin, P. Liu, X. Cui, J. M. A. Rosa, H. Seppännen, D. Li, I. Reduto, S. Honkanen, H. Lipsanen, and Z. Sun, "Wafer-Scale Atomic-Layer-Deposition of Er3+- and Yb3+- Doped Gain Materials for Integrated Photonics," in CLEO 2023, Technical Digest Series (Optica Publishing Group, 2023), paper STh1O.4.

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Abstract

We demonstrate highly-doped Er³⁺ and Yb³⁺ doped gain media on SiN waveguides by plasma-enhanced atomic layer deposition, showing great potential for integrated lasers and amplifiers.

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