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Fully Tunable Fabry-Pérot Cavity on Silicon Photonic MEMS with 10 nW Static Power Consumption

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Abstract

We report on a fully tunable Fabry-Pérot cavity on the silicon photonic MEMS having only 10nW static power. Its resonance wavelength is tunable over the full FSR, and its transmissivity is tunable up to 3.8dB.

© 2023 The Author(s)

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