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Fully Tunable Sagnac Loop Reflector with 0.1 µW Static Power Silicon Photonic MEMS

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Abstract

We report on a MEMS-based integrated tunable Sagnac loop reflector having full reflectivity tuning from 0 to 100% with <0.1 µW static power consumption. A Fabry-Pérot cavity with fine linewidth tunability is also demonstrated.

© 2022 The Author(s)

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