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Inner-Wall Grating Double Slot Microring Resonator for High Sensitivity and Large Measurement Range Label-Free Biochemical Sensing

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Abstract

Based on the SOI platform, a double slot micro ring resonator with inner wall angular gratings is achieved with the highest sensitivity of 562.564 nm/RIU and a large measurement range of 72.62 nm.

© 2023 The Author(s)

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