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Highly Sensitive Concentration Sensing Using Silicon Double-Slot Waveguide

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Abstract

We demonstrate refractive index measurement using a double-slot silicon waveguide- based Mach-Zehnder interferometer. A maximum sensitivity of 700 nm/RIU is experimentally achieved with a limit of detection of 7.142X10-6 RIU.

© 2023 The Author(s)

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