Abstract

The surface acoustic wave (SAW) devices using a ZnO/diamond structure was summarized in this paper including late result on high frequency filter of 3.5GHz by 0.75 μm inter-digital transducers on diamond. This technology is applied to 1.5GHz narrow bandwidth filter by resonator type filter. Theoretical studies with new material systems were also performed. Zero temperature coeeficient filter can be expected by additional amorphous SiO₂ deposition. By LiNbO₃ / diamond structure, high electromechanical coefficient can be expected with high SAW velocity. The varieties of material systems on SAW and advanced devices based on diamond will find broad applications on high frequency devices in future communication systems.

© 1995 Optical Society of America