Characterization of Diamond Films Grown on AIN/Silicon Substrates and of Heterostructures with Such Films.

I.G. Teremetskaya; V.P. Varnin; V.I. Polyakov; A.V. Khomich; P.I. Perov; N.M. Rossukanyi; A.I. Rukovishnikov; A.F. Belyanin; G. Popovici

Applications of Diamond Films and Related Materials: Third International Conference
Technical Digest Series (Optica Publishing Group, 1995),
paper DGGC469

Characterization of Diamond Films Grown on AIN/Silicon Substrates and of Heterostructures with Such Films.

I.G. Teremetskaya, V.P. Varnin, V.I. Polyakov, A.V. Khomich, P.I. Perov, N.M. Rossukanyi, A.I. Rukovishnikov, A.F. Belyanin, and G. Popovici

Applications of Diamond Films and Related Materials 1995

Gaithersburg, MD United States
21–24 August 1995
ISBN:

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Diamond Growth and Growth Characterization (DGGC)

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I. G. Teremetskaya, V. P. Varnin, V. I. Polyakov, A. V. Khomich, P. I. Perov, N. M. Rossukanyi, A. I. Rukovishnikov, A. F. Belyanin, and G. Popovici, "Characterization of Diamond Films Grown on AIN/Silicon Substrates and of Heterostructures with Such Films.," in Applications of Diamond Films and Related Materials: Third International Conference, Technical Digest Series (Optica Publishing Group, 1995), paper DGGC469.

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Abstract

Undoped and boron doped diamond films were grown on AIN coated Si substrates using the HF CVD technique. Optical and electrical characteristics of the films and the structures with such films were measured and analysed.

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