Abstract

A review of recent results obtained in GPI on applications of different types of lasers for treatment of CVD diamond is presented. The list of lasers used includes ArF (193 nm wavelength) and KrF (248 nm) excimer lasers, Cu-vapor laser (510 nm), and Ar⁺ ion laser (457-514 nm). Fast laser polishing of rough surfaces of as-grown diamond films is described, in particular the finishing of coatings of complex shape (cutting tools). Fine patterning of diamond by laser ablation using an optical projection and direct writing techniques has been developed. The engraving the fine-grained diamond films via localized carbon burning in oxygen using a sharply focused continuous wave Ar+ laser is demonstrated. Also described are experiments on Ar+ laser irradiation of seeded substrates to perform selective-area diamond deposition.