Abstract

The feasibility of a 100-femtosecond (fs) pulsed 248-nm UV excimer laser for scribing and blind hole drilling of free-standing diamond was investigated. Raman microprobe analysis, scanning electron microscopy (SEM) and surface profilometer measurement, used to characterize the laser irradiated zones, indicate that fs-laser offered a greater degree of atomization of material removed, reduced thermal component of ablation, absence of clusters and particulates on the machined surfaces, and absence of transformation of diamond to graphite. All these effects are attributed to a new spectrum of fs laser-diamond interactions.

© 1995 Optical Society of America