Abstract

A novel technique is described which results in high rate, controlled finishing of polycrystalline diamond films. Finishing occurs by directing a beam of hyperthermal (5 to 12 eV) oxygen atoms at glancing incidence upon the diamond sample to preferentially etch surface roughness. The high translational energy of the atoms enables high reaction probabilities (up to 1.0) with diamond and consequently rapid etching rates. Rates up to 1.6 μm/hr were observed. Precise control of the thickness of treated films has been demonstrated by using an in-situ monitor of the process. The monitor is capable of thickness control to ±0.05 μm, enabling finishing to precise specifications.

© 1995 Optical Society of America