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Conferences > DP > 2019 > POS2 > 27
  • Symposium Latsis 2019 on Diamond Photonics - Physics, Technologies and Applications
  • OSA Technical Digest (Optica Publishing Group, 2019),
  • paper 27
  • •https://doi.org/10.1364/DP.2019.27

Single Crystal Diamond Micro-Disk Resonators by Focused Ion Beam Milling

Teodoro Graziosi, Sichen Mi, Marcell Kiss, and Niels Quack

Open Access Open Access

Abstract

We present a fabrication scheme for single crystal diamond micro-disk resonators based on oxygen plasma DRIE and multidirectional FIB milling. Acid cleaning and thermal annealing are used to remove the FIB induced crystal damage and we achieve optical quality factors of the order of 5000 in the S- and C-bands.

© 2019 The Author(s)

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