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Conferences > ECEOC > 2022 > Tu5 > Tu5.18
  • European Conference on Optical Communication (ECOC) 2022
  • Technical Digest Series (Optica Publishing Group, 2022),
  • paper Tu5.18

1x 5 Silicon Nitride MEMS Optical Switch

Suraj Sharma, Niharika Kohli, Michaël Ménard, and Frederic Nabki

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Abstract

We demonstrate the first 1x5 electrostatic MEMS optical switch with silicon nitride waveguides that combines analog and digital control. It achieves average insertion losses between 2.2 dB and 5.39 dB for the five switching channels and operates over a wavelength range of 85 nm.

© 2022 The Author(s)

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