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Conferences > ECEOC > 2022 > We5 > We5.71
  • European Conference on Optical Communication (ECOC) 2022
  • Technical Digest Series (Optica Publishing Group, 2022),
  • paper We5.71

Optical Properties of Aluminium Nitride on Insulator for Integrated Photonics

Jasmin Spettel, Marco Liffredo, Tommaso Cassese, Hernán Furci, Florian Dubois, Niels Quack, Mohssen Moridi, Guillermo Villanueva, and Thang Duy Dao

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Abstract

Aluminium nitride is a promising photonic material from the ultra-violet to the mid-infrared spectral range. We present spectroscopic ellipsometry of sputtered AlN thin films on insulator in the spectral range 0.19 µm - 25 µm, surface roughness characterization, waveguide and grating coupler designs at telecom wavelength.

© 2022 The Author(s)

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