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Conferences > CLEO_SI > 2022 > SF3O > SF3O.2

Optical properties of silicon-rich silicon nitride for photonic integrated circuits

Natale G. Pruiti, Christopher Gough, Stuart May, and Marc Sorel

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Abstract

The optical properties of silicon-rich silicon nitride are analyzed for different compositions, obtained by varying the deposition parameters. Here we demonstrate how the bandgap, refractive index, and thermo-optic coefficient depends on the relative silicon composition.

© 2022 The Author(s)

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