Excimer laser with high spectral brightness working in the regenerative amplifier regime

W. Mückenheim; K. Hohla; E. Albers; H. v. Bergmann

Topical Meeting on Excimer Lasers
Technical Digest Series (Optica Publishing Group, 1983),
paper MB7

Excimer laser with high spectral brightness working in the regenerative amplifier regime

W. Mückenheim, K. Hohla, E. Albers, and H. v. Bergmann

Excimer Lasers 1983

Incline Village, Nevada United States
10–12 January 1983
ISBN:

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RGH Lasers II (MB)

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W. Mückenheim, K. Hohla, E. Albers, and H. v. Bergmann, "Excimer laser with high spectral brightness working in the regenerative amplifier regime," in Topical Meeting on Excimer Lasers, Technical Digest Series (Optica Publishing Group, 1983), paper MB7.

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Abstract

An excimer laser system will be presented which delivers at the various excimer lines (ArF, KrF and XeCl) a nearly diffraction limited beam (0.1 mrad) with narrow bandwidths (0.1 cm⁻¹), and energies up to 1 Joule (KrF).

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