Abstract

The large area deposition of high-T_c superconductor films on semiconductor substrates is of central importance for hybrid microelectronic circuits. However, problems arise in deposition, because of strain induced by the lattice mismatch, and interdiffusion of the constituents between superconductor and semiconductor. Here, we examine the microwave properties of YBa₂Cu₃O_7-δ on YSZ-buffered silicon. The critical thickness d_c for YBCO on YSZ/Si is known to be about 50-70 nm. We determine the residual resistance and the absolute value of the magnetic penetration depth for films of different thickness below d_c.

© 1994 IEEE