Silicon-on-Insulator (SOI) Slot Waveguide for Methane Absorption Sensing in the Mid-Infrared

Henock Demessie Yallew; Marek Vlk; Anurup Datta; Sebastián Alberti; Jens Høvik; Astrid Aksnes; Martin Møller Greve; Jana Jágerská

doi:10.1364/ES.2022.EM1D.2

Optical Sensors and Sensing Congress 2022 (AIS, LACSEA, Sensors, ES)
Technical Digest Series (Optica Publishing Group, 2022),
paper EM1D.2
•https://doi.org/10.1364/ES.2022.EM1D.2

Silicon-on-Insulator (SOI) Slot Waveguide for Methane Absorption Sensing in the Mid-Infrared

Henock Demessie Yallew, Marek Vlk, Anurup Datta, Sebastián Alberti, Jens Høvik, Astrid Aksnes, Martin Møller Greve, and Jana Jágerská

Optics and Photonics for Sensing the Environment 2022

Vancouver, British Columbia Canada
11–15 July 2022
ISBN: 978-1-957171-10-4

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Photonic Integrated Sensors (EM1D)

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H. D. Yallew, M. Vlk, A. Datta, S. Alberti, J. Høvik, A. Aksnes, M. M. Greve, and J. Jágerská, "Silicon-on-Insulator (SOI) Slot Waveguide for Methane Absorption Sensing in the Mid-Infrared," in Optical Sensors and Sensing Congress 2022 (AIS, LACSEA, Sensors, ES), Technical Digest Series (Optica Publishing Group, 2022), paper EM1D.2.

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Abstract

We demonstrate SOI slot waveguides for highly sensitive on-chip detection of methane using tunable diode-laser absorption spectroscopy in the mid-infrared. 1.7 ppm limit of detection has been shown with a 1 cm long slot waveguide.

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