Performance of Transition Metal--Carbon Multilayer Mirrors From 80 To 350eV

D. R. Kania; R. J. Bartlett; W. J. Trela; E. Spiller; L. Golub

doi:10.1364/EUV.1984.MD6

Second Topical Meeting on Laser Techniques in the Extreme Ultraviolet
Technical Digest Series (Optica Publishing Group, 1984),
paper MD6
•https://doi.org/10.1364/EUV.1984.MD6

Performance of Transition Metal--Carbon Multilayer Mirrors From 80 To 350eV

D. R. Kania, R. J. Bartlett, W. J. Trela, E. Spiller, and L. Golub

Laser Techniques in the Extreme Ultraviolet 1984

Boulder, Colorado United States
5–7 March 1984
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D. R. Kania, R. J. Bartlett, W. J. Trela, E. Spiller, and L. Golub, "Performance of Transition Metal--Carbon Multilayer Mirrors From 80 To 350eV," in Second Topical Meeting on Laser Techniques in the Extreme Ultraviolet, Technical Digest Series (Optica Publishing Group, 1984), paper MD6.

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Abstract

We have measured the reflectivity of transition metal (Co, Fe, V, and Cr)--carbon multilayer mirrors between 80 to 350 eV. The multilayer structures were fabricated by electron beam evaporation with in situ monitoring during the deposition process in order to maximize the reflectivity of the coating.¹ The effective 2d spacing of all the samples was approximately 150 Å.

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