Abstract

Injection locking of excimer lasers has been shown¹ to be the most efficient way to control the spectral and spatial output of these high-gain systems. We have previously reported injection locking of a KrF system with very lower reference oscillator power, and in this paper we report the injection locking of an XeF laser to transform-limited bandwidth(~ 50 MHz for a 20-ns pulse). Injection locking of XeF has been previously reported,³ but the reference oscillator used was another XeF laser yielding a relatively broadband output linewidth of 0.2 Å (~ 100 GHz).

© 1982 Optical Society of America