Abstract
To illustrate the coherence problems in X-ray imaging we shall examine
- scanning X-ray microscopy
- holography, and
- soft X-ray diffraction
as illustrative examples. We show that only X-rays from within the emittance xx'yy' < (2.44λ)2 have the necessary spatial coherence to yield diffraction- limited images. The degree of temporal coherence required depends on the nature of the imaging system, and the size of the specimen. In conventional X-ray systems, spatial coherence is generated by collimation, while temporal coherence is achieved with monochromators. In these systems, then, one filters out a minute coherent fraction of an intense incoherent beam. Aside from the inefficiency of the procedure, there is a practical limitation of the temporal coherence length of about 103λ that one can generate this way in the soft X-ray regime.
© 1983 Optical Society of America
PDF ArticleMore Like This
O. R. Wood, J. E. Bjorkholm, J. Bokor, L. Eichner, R. R. Freeman, T. E. Jewell, W. M. Mansfield, A. A. MacDowell, L. H. Szeto, D. M. Tennant, W. K. Waskiewicz, D. L. White, D. L. Windt, and J. H. Bruning
WB1 Short Wavelength Coherent Radiation: Generation and Applications (HFSW) 1991
O. R. Wood, J. E. Bjorkholm, J. Bokor, L. Eichner, R. R. Freeman, T. E. Jewell, W. M. Mansfield, A. A. MacDowell, L. H. Szeto, D. M. Tennant, W. K. Waskiewicz, D. L. White, D. L. Windt, and J. H. Bruning
WB1 Soft X-Ray Projection Lithography (SXRAY) 1991
Janos Kirz
MA6 Laser Techniques in the Extreme Ultraviolet (EUVS) 1984