Abstract

Though the fabrication of zoneplates for XUV applications is not an easy task, and though the best zoneplates made to date are inefficient optical elements, these devices find important applications in soft X-ray microscopy where conventional lenses are unavailable. They are are also used as condensers and monochromators, and may even find a role in soft X-ray holography. We review the fabrication methods, the present state of the art and ideas for improvements in resolution and efficiency.

© 1984 Optical Society of America