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Angular and azimuthal ellipsometry of indium tin oxide films

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Abstract

Indium tin oxide (ITO) is a solid solution of indium (III) oxide (In2O3) and tin (IV) oxide (SnO2).It is a topical subject of research in modern physics. This material combines high transparency (in the visible area) and conductivity. It is used in the production of transparent electrodes of liquid crystal screens and solar cells. ITO parameters are defined by using various optical methods, including ellipsometry. Ellipsometry is a highly sensitive non-contact and hence non-destructive method. This technique is widely used to study thin films. The aim of this work was to investigate the optical properties of thin films of ITO. Optical constants of these films were calculated using obtained ellipsometric parameters. Film thicknesses are 21-34 nm, and their refractive index varies on 2,05-2,12.

© 2014 Optical Society of America

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