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Indium - Tin - Oxide Films for Optical Applications

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Indium-Tin-Oxide (ITO) films exhibit a combination of useful properties. The most important of these are high transmittance at short wavelengths (visible light), high reflectance at long wavelengths (thermal infrared radiation), low electrical resistance, strong adherence to glass and other substrates, and good chemical inertness. As a consequence, ITO films are presently being used on a large and increasing scale. The optical and electrical properties of the ITO films are often a limiting factor for device performance etc., and it is therefore not surprising that ITO - and similar materials - have been extensively studied in many laboratories throughout the world during recent years.1-3 The main purpose of this paper is to discuss the current experimental and theoretical status for optimized ITO films. Detailed reports on this work are given elsewhere.4-8

© 1984 Optical Society of America

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