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Conferences > FiO > 2015 > FTh3G > FTh3G.3

High-Contrast 3D Surface Topographic Imaging With Near Wavelength-Limited Resolution Using Ptychography

Dennis F. Gardner, Elisabeth R. Shanblatt, Bosheng Zhang, Matthew D. Seaberg, Christina L. Porter, Robert M. Karl, Michael D. Tanksalvala, Margaret M. Murnane, Henry C. Kapteyn, and Daniel E. Adams

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Abstract

We achieve high-contrast, 3D surface topographic imaging with a lateral resolution of 1.3λ and with 6Å axial precision using ptychographic coherent diffraction imaging and a high-harmonic source at 30nm.

© 2015 Optical Society of America

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