A suspended focusing Si3N4 metamirror for integrated cavity optomechanics

Aman R. Agrawal; Jack P. Manley; Daniel Allepuz-Requena; Dalziel J. Wilson

doi:10.1364/FIO.2023.FTh3B.4

Frontiers in Optics + Laser Science 2023 (FiO, LS)
Technical Digest Series (Optica Publishing Group, 2023),
paper FTh3B.4
•https://doi.org/10.1364/FIO.2023.FTh3B.4

A suspended focusing Si₃N₄ metamirror for integrated cavity optomechanics

Aman R. Agrawal, Jack P. Manley, Daniel Allepuz-Requena, and Dalziel J. Wilson

Frontiers in Optics 2023

Tacoma, Washington United States
9–12 October 2023
ISBN: 978-1-957171-29-6

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Novel Platforms, Methods, and Devices (FTh3B)

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A. R. Agrawal, J. P. Manley, D. Allepuz-Requena, and D. J. Wilson, "A suspended focusing Si3N4 metamirror for integrated cavity optomechanics," in Frontiers in Optics + Laser Science 2023 (FiO, LS), Technical Digest Series (Optica Publishing Group, 2023), paper FTh3B.4.

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Abstract

We have realized a suspended, high-reflectivity focusing metamirror (f = 10 cm, R ≈ 99%), by gradient pitch photonic crystal patterning of a Si3N4 membrane. The design enables construction of stable, ultra-short (L = 30 µm), high-finesse (ℱ > 200) cavities for optomechanical sensing and quantum experiments.

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