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High-speed off-chip beam steering via photonic integrated waveguides embedded on vertical ski-jump cantilevers

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Abstract

We report a curled vertically emitting integrated waveguide on a piezo-actuated cantilever monolithically integrated into a photonic integrated circuit. The device provides high-speed, diffraction limited beam steering at visible wavelengths for low applied voltages.

© 2023 The Author(s)

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