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Conferences > FiO > 2023 > JM4A > JM4A.55

Digital holographic profilometry with spherical-wave illumination scanning

Moncy Sajeev Idicula, Kai Wen, Michał Józwik, Hyon-Gon Choo, Peng Gao, and Tomasz Kozacki

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Abstract

A novel measurement method named multi-angle spherical-wave scanning digital holographic profilometry (MISDHP) for acquiring the surface of high gradient objects beyond the NA of the setup is proposed.

© 2023 The Author(s)

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