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Conferences > FiO > 2023 > JM7A > JM7A.145

Effect of the Ambient Gas Pressure on LIBS Enhancement of Single Crystalline Silicon

Amal Abdlelfattah Khedr, Salah Hassb Elnabi, Hisham Imam, and Mohamed Abdelharith

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Abstract

Single crystalline silicon (111) has been targeted in present article. Pulsed laser induced breakdown spectroscopy (LIBS) is an efficient analytical tool for process-line characterization. LIBS technique has been employed under different atmospheric conditions. Another study has been investigated on the silicon spectra under the ambient conditions of argon and air that shows the capability of argon to enhance the LIBS silicon spectra.

© 2023 The Author(s)

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