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Conferences > FiO > 2023 > JTu5A > JTu5A.17

High-Efficiency Si3N4 Grating Coupler with Bottom Bragg Reflector for Micro-Transfer Printed InP Photodiodes

Laurens Bogaert and Gunther Roelkens

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Abstract

We present FDTD simulation results and a corner analysis for the design of Si3N4 grating couplers with embedded amorphous-Si/SiO2 DBR bottom mirror providing up to 99.58% coupling efficiency at 1560nm to micro-transfer printed InP photodiodes.

© 2023 The Author(s)

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