Wafer-Scale Fabrication of Quantum Photonic Devices in Silicon Carbide

Sridhar Majety; Pranta Saha; Marina Radulaski

doi:10.1364/FIO.2023.JTu5A.40

Frontiers in Optics + Laser Science 2023 (FiO, LS)
Technical Digest Series (Optica Publishing Group, 2023),
paper JTu5A.40
•https://doi.org/10.1364/FIO.2023.JTu5A.40

Wafer-Scale Fabrication of Quantum Photonic Devices in Silicon Carbide

Sridhar Majety, Pranta Saha, and Marina Radulaski

Frontiers in Optics 2023

Tacoma, Washington United States
9–12 October 2023
ISBN: 978-1-957171-29-6

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Joint Poster Session III (JTu5A)

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S. Majety, P. Saha, and M. Radulaski, "Wafer-Scale Fabrication of Quantum Photonic Devices in Silicon Carbide," in Frontiers in Optics + Laser Science 2023 (FiO, LS), Technical Digest Series (Optica Publishing Group, 2023), paper JTu5A.40.

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Abstract

We develop a wafer-scale process for nanofabrication of color center photonic devices in an arbitrary silicon carbide substrate using a reactive ion beam etching approach with a rotating tilted wafer.

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