Abstract

One of methods for fabricating a distributed-index planar microlens¹⁾ is a selective ion-exchange or electro-migration technique, which introduces metal ions into a glass substrate through a circular window mask. Although the ion-exchange technique is valid to simplify the fabrication process, the electromigration method which enable us to control the index distribution can realize a lens with a large NA and small aberration. However, its index profile formation process has not fully been clarified. In this study, on the basis of the previous work²⁾, we have introduced a local field effect for simulating the process and obtained better agreement with an actual semispherical distribution.

© 1987 Optical Society of America