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Optical Waveguides in InGaAsP And InP by Metal Diffusion

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Abstract

Strip waveguides have been formed on semiconductor heterostructure planar waveguides by etching ridges to provide dielectric loading[1] or by the photoelastic effect[2]. Lateral guiding has also been produced in semiconductor lasers by various buried structures that require etching and regrowth. For the most part, these strip guides do not contain bends.

© 1982 Optical Society of America

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