A novel 3-dimensional ARROW by thin film patterning — Stripe Lateral Confinement of ARROW —

T. Baba; Y. Kokubun; Y. Mera

doi:10.1364/IGWO.1989.TuBB5

Integrated and Guided-Wave Optics
Technical Digest Series (Optica Publishing Group, 1989),
paper TuBB5
•https://doi.org/10.1364/IGWO.1989.TuBB5

A novel 3-dimensional ARROW by thin film patterning — Stripe Lateral Confinement of ARROW —

T. Baba, Y. Kokubun, and Y. Mera

Integrated and Guided Wave Optics 1989

Houston, Texas United States
6–8 February 1989
ISBN:

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Passive Waveguides and Components (TuBB)

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T. Baba, Y. Kokubun, and Y. Mera, "A novel 3-dimensional ARROW by thin film patterning — Stripe Lateral Confinement of ARROW —," in Integrated and Guided-Wave Optics, Technical Digest Series (Optica Publishing Group, 1989), paper TuBB5.

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Abstract

A novel 3-dimensional structure of ARROW by etching a very thin intermediate film into stripe geometry was proposed and demonstrated. This technique can be applied to the 3-dimensional stacked waveguide interconnection.

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