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Compound Bragg Reflection Filters Made by a High Resolution Deep Ultraviolet Stepper

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Optical filters are required for a variety of applications in optical communications such as wavelength division multiplexing and rejection of unwanted spontaneous emission in optical amplification. A good filter should have high throughput, a flat pass band and a high degree of rejection of unwanted wavelengths. Bragg filters having thousands of lines are capable of meeting these needs. In general, it is necessary to vary the period of these lines and to be able to form such filters at different places on the integrated optical circuit (IOC) chip.

© 1989 Optical Society of America

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