Abstract

Multilayer optical filters are suitable for waveglength multiplexers/demultiplexers because of their high performance of broad wave length range (large tolerance), high suppression ratio, and large freedom of design. However, it is difficult to integrate them monolithically with waveguide-type devices, as achieved by grating,¹ directional couplers,^2,3 and ARROW.⁴ In this study we investigate a novel technique to fabricate multilayer filters on a vertical surface of substrate monolithically and demonstrate the integration of multilayer filter and photodetector, which can be applied to an integrated device of optical waveguide, demultiplexer, and waveguide photodetector, as shown in Fig. 1.

© 1990 Optical Society of America