Abstract

Photoreceivers integrated with a Final stage of guided-wave optical processing are envisaged for both coherent and multichannel WDM detection systems.^1,2 Successful implementation requires photodetectors that are efficiently coupled to the waveguides. This may be achieved by forming the guide adjacent to the detector and butt-coupled light directly into the side of the absorption region.^3,4 In this paper we report the fabrication of a fast, efficient butt-coupled interdigitated InGaAs metal–semiconductor-metal (MSM) Schottky barrier waveguide detector mono­lithically integrated with an InP/InGaAsP/InP waveguide.

© 1990 Optical Society of America