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Optica Publishing Group
  • OSA Advanced Photonics Congress (AP) 2019 (IPR, Networks, NOMA, SPPCom, PVLED)
  • OSA Technical Digest (Optica Publishing Group, 2019),
  • paper IM3A.2

Parameter extraction, variability analysis and yield prediction of the photonic integrated circuits

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We discuss the complete workflow from the extraction of behavioral and fabricated geometry parameters using optical measurements to a decomposition of spatial variability and ultimately to the layout-aware yield prediction of photonic integrated circuits (PIC).

© 2019 The Author(s)

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