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A MEMS-Tunable Polarization Rotator for PICs

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Abstract

We describe a micromechanically-tunable polarization rotator for photonic integrated circuits. A suspended micro-mechanical (MEMS) beam enables symmetry-breaking mode perturbation and polarization rotation. Vertical actuation results in tunable rotation over 90 degrees and full TE-TM conversion.

© 2022 The Author(s)

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