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Fourier surface grating couplers for integrated photonics

Nolan Lassaline, Daniel Chelladurai, Manuel Kohli, Roger Ulrich, Yannik Glauser, Daniel Petter, Juerg Leuthold, and David J. Norris

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Abstract

We incorporate Fourier surfaces into silicon waveguides with vertical tapers for next-generation photonic grating couplers. By combining thermal scanning-probe lithography and reactive-ion etching, we generate gratings with smoothly apodized depth profiles and multi-wavelength coupling functionality.

© 2022 The Author(s)

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