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Conferences > IPRSN > 2023 > ITu2A > ITu2A.4

Low-loss amorphous silicon carbide photonics and its heterogeneous integration with existing high performance active/passive platforms

Bruno Lopez-Rodriguez, Roald van der Kolk, Samarth Aggarwal, Zizheng Li, Naresh Sharma, Thomas Scholte, Harish Bhaskaran, and Iman Esmaeil Zadeh

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Abstract

In this work, we fabricate and characterize ring resonators on ICPCVD-deposited a-SiC films at a low temperature of 150°C, demonstrating exceptional intrinsic quality factors and low waveguide propagation losses, thus highlighting the potential for a-SiC as a valuable platform for future hybrid photonic technologies.

© 2023 The Author(s)

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