Abstract
Because of its short wavelength and high photon energy, vacuum ultraviolet (VUV) light sources have been actively used for various advanced application fields such as materials processing, spectroscopy and biology. Rare-gas excimers are one of the few efficient VUV light sources and their emission wavelengths cover most of the VUV spectral region between 100 nm and 200nm. For such application fields, efficient and compact rare-gas excimer light sources are in high demand.
© 1996 Optical Society of America
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