Abstract

There have been considerable demands for the development of short wavelength incoherent light sources in vacuum ultraviolet (VUV), which could produce sizable output powers with a reasonable operation efficiency in moderate sizes. Such compact VUV light sources would be applicable to various fields such as materials processing and spectroscopy. There are various types of VUV light sources which are developed by using different kinds of excitation schemes. Among such VUV light sources, rare gas excimers are known to be one of the most efficient molecules to produce VUV radiation in the wavelength range between 100 and 200 nm. The efficient and high-power laser operation of such rare gas excimers excited by a large-scale intense electron beam has extensively studied by our group.¹

© 1995 IEEE