Abstract

Two-dimensional images of relative atomic hydrogen concentration in reactive gas layers were produced using two-photon Laser Induced Fluorescence (LIF). The measurements were made i.e below the substrate. The laser was a pulsed frequency-tripled dye laser operating at 205 nm. The pulse energy was in the range of 100-1000 J. The image area has size of 10×0.5 cm with 0.2 mm spatial resolution.

© 2000 IEEE