Abstract

Two-dimensional maps of atomic hydrogen fluorescence signal in reactive gas layers were produced using two-photon Laser Induced Fluorescence (LIF). The measurements were made in situ in conditions of diamond film chemical vapor deposition using a thermal inductively coupled plasma as the activation medium. In these conditions the reactive gas layer is typically a few millimeters thick and the temperature drops across the layer from 4000 K at the free stream boundary to about 1200 K at the substrate. The reactive layer exhibits strong chemical non-equilibrium. The two-photon laser emission at 205 nm was generated by frequency-tripling a pulsed dye laser output. The fluorescence signal was detected with an intensified CCD camera.

© 1998 IEEE