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Line-Field White-Light Interferometry for Varied Reflective Surface Imaging

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Abstract

We propose line-field white-light interferometry (WLI) system that utilizes tunable-path-difference source (TPDS) and signal saturation compensation technique. Our WLI has improved performance in terms image stability, speed, and the capability of varied reflective surface imaging.

© 2023 The Author(s)

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