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Conferences > ISISOM > 2022 > ITuPG > ITuPG_01
  • Proceedings of the 2022 International Symposium on Imaging, Sensing, and Optical Memory (ISOM) and the 13th International Conference on Optics-photonics Design and Fabrication (ODF)
  • Technical Digest Series (Optica Publishing Group, 2022),
  • paper ITuPG_01

Exploitation of the whole Information Content of the Light Field for the Inspection of Micro- and Nano-Components: Approaches & Limitations

W. Osten and M. L. Gödecke

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Abstract

The current challenges for optical metrology and the physical limitations are addressed. Afterwards a systematization of existing approaches for resolution enhancement is presented and some modern approaches taking into account the whole information content of the light field are discussed.

© 2022 IEEE

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