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Conferences > JSAP > 2021 > TP > 12p_N405_4
  • JSAP-OSA Joint Symposia 2021 Abstracts
  • OSA Technical Digest (Optica Publishing Group, 2021),
  • paper 12p_N405_4

Measurement of Optically Dense Semiconductor with 1020 cm-3 Carrier Density by Terahertz Time-Domain Ellipsometry

Verdad C. Agulto, Toshiyuki Iwamoto, Hideaki Kitahara, Kazuhiro Toya, Valynn Katrine Mag-usara, Masayuki Imanishi, Yusuke Mori, Masashi Yoshimura, and Makoto Nakajima

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Abstract

In the characterization of optically dense materials such as heavily doped semiconductors, transmission terahertz time-domain spectroscopy (THz-TDS) is mainly constrained by the material’s thickness and free carrier absorption.

© 2021 Japan Society of Applied Physics, The Optical Society (OSA)

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